{"id":6523,"date":"2026-06-11T09:09:56","date_gmt":"2026-06-11T09:09:56","guid":{"rendered":"https:\/\/wiresawcutter.com\/?p=6523"},"modified":"2026-06-11T09:09:56","modified_gmt":"2026-06-11T09:09:56","slug":"wafer-thinning","status":"publish","type":"post","link":"https:\/\/wiresawcutter.com\/tr\/blog\/wafer-thinning\/","title":{"rendered":"Gofret \u0130nceltme \u0130\u015flemi: Back-Grind &amp; Back-Lap Teknolojisi A\u00e7\u0131kland\u0131"},"content":{"rendered":"<div class=\"seo-blog-content\" style=\"padding: 0px 0;\">\n<p style=\"margin: 0 0 20px;\">Gofret inceltme, bitmi\u015f bir silikon gofretin ta\u015fland\u0131\u011f\u0131 ve tam kullan\u0131m kal\u0131nl\u0131\u011f\u0131ndan bir k\u0131sm\u0131na kadar cilaland\u0131\u011f\u0131 arka u\u00e7 ad\u0131md\u0131r. Nadiren man\u015fetlere \u00e7\u0131kar, ancak her istiflenmi\u015f bellek k\u00fcp\u00fc, her ince g\u00fc\u00e7 cihaz\u0131 ve her ak\u0131ll\u0131 kart \u00e7ipi buna ba\u011fl\u0131d\u0131r. Bu k\u0131lavuz, gofret inceltmenin ne oldu\u011fu, bunu yapan y\u00f6ntemler, \u00f6nemli olan kal\u0131nl\u0131k hedefleri ve inceltilmi\u015f bir gofretin hayatta kal\u0131p \u00e7al\u0131\u015fmaya ba\u015flamas\u0131na karar veren kalite s\u0131n\u0131rlar\u0131 boyunca y\u00fcr\u00fcr.<\/p>\n<div style=\"margin: 24px 0; padding: 20px 24px; background: #f5f5f5; border: 1px solid #e0e0e0; border-top: 3px solid #2d2d2d;\">\n<h3 style=\"margin: 0 0 16px;\">H\u0131zl\u0131 \u00d6zellikler: Bir Bak\u0131\u015fta Gofret \u0130nceltme<\/h3>\n<table style=\"width: 100%; border-collapse: collapse;\">\n<tbody>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 8px 12px; font-weight: 600; width: 42%; color: #6b7280;\">Ba\u015flang\u0131\u00e7 kal\u0131nl\u0131\u011f\u0131 (200\/300 mm)<\/td>\n<td style=\"padding: 8px 12px;\">~725\u2013775 \u00b5m<\/td>\n<\/tr>\n<tr style=\"background: #ffffff; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 8px 12px; font-weight: 600; color: #6b7280;\">Yayg\u0131n inceltilmi\u015f hedef<\/td>\n<td style=\"padding: 8px 12px;\">75\u201350 \u00b5m; 3D\/HBM i\u00e7in ultra ince &lt;50 \u00b5m<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 8px 12px; font-weight: 600; color: #6b7280;\">\u00c7ekirdek y\u00f6ntemler<\/td>\n<td style=\"padding: 8px 12px;\">Kaba + ince \u00f6\u011f\u00fctme \u2192 CMP \/ plazma veya \u0131slak a\u015f\u0131nd\u0131rma (stres giderme)<\/td>\n<\/tr>\n<tr style=\"background: #ffffff; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 8px 12px; font-weight: 600; color: #6b7280;\">Anahtar kalite \u00f6l\u00e7\u00fcmleri<\/td>\n<td style=\"padding: 8px 12px;\">TTV, y\u00fczey alt\u0131 hasar derinli\u011fi, kal\u0131p k\u0131r\u0131lma mukavemeti, kenar b\u00fct\u00fcnl\u00fc\u011f\u00fc<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 8px 12px; font-weight: 600; color: #6b7280;\">Oturdu\u011fu yer<\/td>\n<td style=\"padding: 8px 12px;\">Dilimlemeden sonra, do\u011framadan \u00f6nce (die singulation)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">Gofret \u0130nceltme Nedir?<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6524\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/1-9.png\" alt=\"Gofret \u0130nceltme Nedir?\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<p style=\"margin: 0 0 16px;\"><strong>Gofret inceltme, arkadan ta\u015flama, cilalama ve a\u015f\u0131nd\u0131rma kullan\u0131larak, cihaz imalat\u0131ndan sonra bitmi\u015f bir yar\u0131 iletken gofretin kal\u0131nl\u0131\u011f\u0131n\u0131n tipik olarak yakla\u015f\u0131k 775 \u00b5m'den 75\u201350 \u00b5m ve alt\u0131na d\u00fc\u015f\u00fcr\u00fclmesi i\u015flemidir.<\/strong> Bu, levha k\u00fcl\u00e7eden dilimlendikten sonra ve tek tek tala\u015flara b\u00f6l\u00fcnmeden \u00f6nce ger\u00e7ekle\u015fir, b\u00f6ylece arka taraf \u00e7\u0131kar\u0131l\u0131rken \u00f6n taraftaki devreler korunur. Bu y\u0131\u011f\u0131n\u0131n \u00e7\u0131kar\u0131lmas\u0131, daha iyi istiflenen ve \u0131s\u0131y\u0131 daha h\u0131zl\u0131 ileten daha ince, daha d\u00fc\u015f\u00fck profilli bir kal\u0131p verir.<\/p>\n<p style=\"margin: 0 0 16px;\">Gofretler bilerek kal\u0131n ba\u015flar. 200 mm veya 300 mm'de, bir gofret d\u00fcz kalmak ve \u00f6n u\u00e7 i\u015flemenin \u0131s\u0131 d\u00f6ng\u00fclerinde hayatta kalmak i\u00e7in kabaca 725\u2013775 \u00b5m kal\u0131nl\u0131\u011f\u0131ndad\u0131r <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/en.wikipedia.org\/wiki\/Wafer_backgrinding\" target=\"_blank\" rel=\"nofollow noopener\">Wafter geri ta\u015flama Vikipedi genel bak\u0131\u015f<\/a>. Devreler olu\u015fturulduktan sonra, silikonu destekleyen her \u015fey istiflemeyi engelleyen ve \u0131s\u0131n\u0131n uzakla\u015ft\u0131r\u0131lmas\u0131n\u0131 yava\u015flatan \u00f6l\u00fc a\u011f\u0131rl\u0131k haline gelir, dolay\u0131s\u0131yla \u00f6\u011f\u00fct\u00fcl\u00fcr. Ayr\u0131ca geri ta\u015flama (veya geri ta\u015flama), geri sarma, geri kaplama veya arkadan ta\u015flama ad\u0131 verilen ad\u0131m\u0131 da g\u00f6receksiniz; ayn\u0131 operasyon ailesini ifade ederler.<\/p>\n<p style=\"margin: 0 0 16px;\">Bir \u00fcretim levhas\u0131n\u0131 \u00e7ok uza\u011fa ta\u015flamak risklidir: \u00e7atlar, \u00e7\u00fcnk\u00fc inceltilmi\u015f arka taraf, kal\u0131n \u00f6n taraf\u0131n asla absorbe etmek zorunda kalmad\u0131\u011f\u0131 ta\u015flama gerilimini ta\u015f\u0131r. Uygulamada fabrikalar, son 50 \u00b5m silikonu t\u00fcm hattaki en k\u0131r\u0131lgan malzeme olarak ele al\u0131r.<\/p>\n<p style=\"margin: 0 0 16px;\">Arka u\u00e7 ak\u0131\u015f\u0131na inceltme yerle\u015ftirmeye yard\u0131mc\u0131 olur: bir elmas <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/high-tech-precision\/silicon-wafer-cutting-wire-saw\/\" target=\"_blank\">tel testere gofreti dilimliyor<\/a> k\u00fcl\u00e7eden \u00f6n taraf fab \u015feklinde desenlendirilir, ard\u0131ndan gofret desenlendirilir <em>inceltilmi\u015f<\/em> arkadan bak\u0131ld\u0131\u011f\u0131nda ve sonunda \u00e7iplere do\u011franm\u0131\u015f durumda. Yukar\u0131 y\u00f6ndeki resmin tamam\u0131 i\u00e7in k\u0131lavuzumuza bak\u0131n <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/blog\/semiconductor-manufacturing-process\/\" target=\"_blank\">yar\u0131 iletken \u00fcretim s\u00fcreci<\/a>.<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">Gofretler Neden \u0130ncelenir<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6525\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/2-9.png\" alt=\"Gofretler Neden \u0130ncelenir\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<p style=\"margin: 0 0 16px;\"><strong>Gofretler, paket y\u00fcksekli\u011fini k\u00fc\u00e7\u00fcltmek, 3D istiflemeyi m\u00fcmk\u00fcn k\u0131lmak, termal direnci kesmek ve elektrik kay\u0131plar\u0131n\u0131 azaltmak i\u00e7in inceltilir.<\/strong> D\u00fcz \u00e7ip \u00fczerinde sistem tasar\u0131mlar\u0131ndan 3D-IC'lere ve geli\u015fmi\u015f paketlere ge\u00e7i\u015f ana etkendir: daha ince kal\u0131p, sinyallerin daha az enerjiyle daha k\u0131sa mesafeler kat etmesine olanak tan\u0131r <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/semiengineering.com\/the-rise-of-thin-wafer-processing\/\" target=\"_blank\" rel=\"nofollow noopener\">Yar\u0131 iletken M\u00fchendisli\u011fi \u00f6zelli\u011fi ince gofret i\u015fleme \u00fczerinde<\/a> a\u00e7\u0131klar.<\/p>\n<p style=\"margin: 0 0 16px;\">\u0130nceltme ipinde birka\u00e7 beton \u00e7ekme:<\/p>\n<ul style=\"margin: 16px 0; padding-left: 22px;\">\n<li style=\"padding: 4px 0;\">3D paketleme ve HBM istifleme: 12 DRAM kal\u0131p art\u0131 bir temel mant\u0131k \u00e7ipine sahip y\u00fcksek bant geni\u015fli\u011fine sahip bir bellek mod\u00fcl\u00fc, bir ana silikon levhadan hala daha ince olabilir. Bu yaln\u0131zca her kal\u0131b\u0131n agresif bir \u015fekilde inceltilmesi nedeniyle m\u00fcmk\u00fcnd\u00fcr.<\/li>\n<li style=\"padding: 4px 0;\">G\u00fc\u00e7 ve RF cihazlar\u0131: Alt tabakan\u0131n inceltilmesi, a\u00e7\u0131k direnci azalt\u0131r ve ba\u011flant\u0131 noktas\u0131ndan \u0131s\u0131 \u00e7\u0131kar\u0131m\u0131n\u0131 art\u0131r\u0131r.<\/li>\n<li style=\"padding: 4px 0;\">TSV ortaya koyuyor: Silikon yoluyla ge\u00e7i\u015fler, arka taraf\u0131n, istiflenmi\u015f ara ba\u011flant\u0131lar\u0131n temeli olan ara u\u00e7lara kadar inceltilmesiyle ortaya \u00e7\u0131kar.<\/li>\n<li style=\"padding: 4px 0;\">Form fakt\u00f6r\u00fc: ak\u0131ll\u0131 kartlar, t\u0131bbi implantlar ve esnek elektronikler, bir laminatta b\u00fck\u00fclecek veya kaybolacak kadar ince silikona ihtiya\u00e7 duyar.<\/li>\n<\/ul>\n<h3 style=\"margin: 32px 0 12px;\">Silikon bir gofret ne kadar ince olabilir?<\/h3>\n<p style=\"margin: 0 0 16px;\">Hacimli \u00fcretimde, 75\u201350 \u00b5m rutindir ve ultra ince \u00e7al\u0131\u015fma 50 \u00b5m'nin alt\u0131nda \u00e7al\u0131\u015f\u0131r; geli\u015fmi\u015f paketleme hatlar\u0131 en agresif y\u0131\u011f\u0131nlar i\u00e7in 20 \u00b5m'ye ve daha inceye do\u011fru ilerler. Pratikte bu zemin \u00f6\u011f\u00fct\u00fcc\u00fc taraf\u0131ndan ayarlanmaz, ne kadar mekanik mukavemet ve kullan\u0131m marj\u0131ndan vazge\u00e7meye istekli oldu\u011funuza g\u00f6re ayarlan\u0131r.<\/p>\n<p style=\"margin: 0 0 16px;\">Kabaca 100 \u00b5m'nin alt\u0131nda bir levha, genellikle daha sonra ele ald\u0131\u011f\u0131m\u0131z bir ta\u015f\u0131y\u0131c\u0131ya ihtiya\u00e7 duyacak kadar esnek ve k\u0131r\u0131lgan hale gelir. D\u00fcr\u00fcst cevap, \u201cm\u00fcmk\u00fcn olan en ince\u201d say\u0131n\u0131n nadiren do\u011fru hedef oldu\u011fudur; do\u011fru hedef, cihaz\u0131n\u0131z\u0131n, istifleme \u015femas\u0131n\u0131n ve ta\u015f\u0131ma hatt\u0131n\u0131n g\u00fcvenilir bir \u015fekilde destekleyebilece\u011fi en ince hedeftir.<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">Kar\u015f\u0131la\u015ft\u0131r\u0131lan Gofret \u0130nceltme Y\u00f6ntemleri: Ta\u015flama, Lapping, CMP &amp; Etch<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6526\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/3-9.png\" alt=\"Kar\u015f\u0131la\u015ft\u0131r\u0131lan Gofret \u0130nceltme Y\u00f6ntemleri: Ta\u015flama, Lapping, CMP &amp; Etch\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<p style=\"margin: 0 0 16px;\">Hi\u00e7bir alet temiz, stressiz bir y\u00fczeye sahip 775 \u00b5m'den 50 \u00b5m'ye kadar bir levha almaz. \u0130nceltme bir dizidir ve bunu anlaman\u0131n en iyi yolu bizim dedi\u011fimiz \u015feydir <strong>hasar Derinli\u011fi Merdiveni<\/strong>: Her ad\u0131m \u00f6ncekinden daha az malzemeyi kald\u0131r\u0131r, ancak ayn\u0131 zamanda daha ince hasar\u0131 da ortadan kald\u0131r\u0131r, b\u00f6ylece hasar derinli\u011finde a\u015fa\u011f\u0131 inerken hedefe do\u011fru a\u015fa\u011f\u0131 inersiniz.<\/p>\n<div style=\"margin: 24px 0; overflow-x: auto;\">\n<table style=\"width: 100%; border-collapse: collapse; border: 1px solid #e0e0e0;\">\n<caption style=\"caption-side: top; text-align: left; font-weight: 600; padding: 8px 0; color: #2d2d2d;\">Gofret inceltme y\u00f6ntemleri ve kal\u0131nl\u0131k de\u011fi\u015fiminin her biri tutabilir (kaba \u00f6\u011f\u00fctme birka\u00e7 \u00b5m b\u0131rak\u0131r; iyon \u0131\u015f\u0131n\u0131yla d\u00fczeltme ~25 nm'ye ula\u015f\u0131r).<\/caption>\n<thead>\n<tr style=\"background: #2d2d2d; color: #ffffff;\">\n<th style=\"padding: 12px 16px; text-align: left; font-weight: 600;\" scope=\"col\">Y\u00f6ntem<\/th>\n<th style=\"padding: 12px 16px; text-align: left; font-weight: 600;\" scope=\"col\">Rol\u00fc<\/th>\n<th style=\"padding: 12px 16px; text-align: left; font-weight: 600;\" scope=\"col\">Tuttu\u011fu kal\u0131nl\u0131k de\u011fi\u015fimi<\/th>\n<th style=\"padding: 12px 16px; text-align: left; font-weight: 600;\" scope=\"col\">Yer alt\u0131 hasar\u0131 kald\u0131<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">Kaba ta\u015flama<\/td>\n<td style=\"padding: 12px 16px;\">Toplu kald\u0131rma (h\u0131zl\u0131)<\/td>\n<td style=\"padding: 12px 16px;\">Birka\u00e7 \u00b5m<\/td>\n<td style=\"padding: 12px 16px;\">En derin (mikron)<\/td>\n<\/tr>\n<tr style=\"background: #f5f5f5; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">\u0130nce ta\u015flama<\/td>\n<td style=\"padding: 12px 16px;\">Y\u00fczey ar\u0131tma<\/td>\n<td style=\"padding: 12px 16px;\">~1 \u00b5m<\/td>\n<td style=\"padding: 12px 16px;\">Azalt\u0131lm\u0131\u015f<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">Al\u0131\u015ft\u0131rma<\/td>\n<td style=\"padding: 12px 16px;\">D\u00fczle\u015ftirin (gev\u015fek a\u015f\u0131nd\u0131r\u0131c\u0131)<\/td>\n<td style=\"padding: 12px 16px;\">Alt um<\/td>\n<td style=\"padding: 12px 16px;\">Orta derecede<\/td>\n<\/tr>\n<tr style=\"background: #f5f5f5; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">CMP (kimyasal-mekanik parlatma)<\/td>\n<td style=\"padding: 12px 16px;\">Stres giderme + d\u00fczlemselle\u015ftirme<\/td>\n<td style=\"padding: 12px 16px;\">Birka\u00e7 y\u00fcz nm<\/td>\n<td style=\"padding: 12px 16px;\">D\u00fc\u015f\u00fck<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">Plazma \/ kuru a\u015f\u0131nd\u0131rma<\/td>\n<td style=\"padding: 12px 16px;\">Hasar giderme<\/td>\n<td style=\"padding: 12px 16px;\">10\u2013100 nm<\/td>\n<td style=\"padding: 12px 16px;\">\u00c7ok d\u00fc\u015f\u00fck<\/td>\n<\/tr>\n<tr style=\"background: #f5f5f5; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">\u0130yon \u0131\u015f\u0131nl\u0131 \/ \u0131slak a\u015f\u0131nd\u0131rma (son d\u00fczeltme)<\/td>\n<td style=\"padding: 12px 16px;\">Hassas trim<\/td>\n<td style=\"padding: 12px 16px;\">~25 nm<\/td>\n<td style=\"padding: 12px 16px;\">Minimal<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p style=\"margin: 8px 0 0; font-size: 0.9em; color: #6b7280;\">Yar\u0131iletken M\u00fchendisli\u011fi'nde bildirilen hassas-merdiven verilerine g\u00f6re varyasyon rakamlar\u0131; iyon-\u0131\u015f\u0131n k\u0131rpma, de\u011fi\u015fimi kabaca 20 kat (\u00f6rne\u011fin, 250 nm ila 25 nm) kesebilir.<\/p>\n<\/div>\n<blockquote style=\"margin: 24px 0; padding: 20px 24px; background: #f5f5f5; border-left: 3px solid #2d2d2d; font-style: italic;\">\n<p style=\"margin: 0;\">\u201cEn kaba y\u00f6ntem, birka\u00e7 mikron aral\u0131\u011f\u0131nda son kal\u0131nl\u0131k de\u011fi\u015fimini veren levha \u00f6\u011f\u00fctme ad\u0131m\u0131d\u0131r. CMP ad\u0131mlar\u0131 daha hassast\u0131r... ve orada birka\u00e7 y\u00fcz nanometrelik bir varyasyona ula\u015fabilirsiniz. Daha sonra, plazma a\u015f\u0131nd\u0131rma ile 10 ila 100 nanometreye ula\u015fabilirsiniz.\u201d<\/p>\n<p><cite style=\"display: block; margin-top: 8px; font-style: normal; font-weight: 600; color: #6b7280;\">Matthias Nestler, Scia Systems \u00dcr\u00fcn ve Teknoloji Direkt\u00f6r\u00fc, al\u0131nt\u0131 yapt\u0131 <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/semiengineering.com\/the-rise-of-thin-wafer-processing\/\" target=\"_blank\" rel=\"nofollow noopener\">Yar\u0131iletken M\u00fchendisli\u011fi<\/a><\/cite><\/p><\/blockquote>\n<p style=\"margin: 0 0 16px;\">Yararl\u0131 bir y\u00f6ntem se\u00e7im kural\u0131: se\u00e7in <em>en kaba<\/em> yak\u0131nla\u015fman\u0131z\u0131 sa\u011flayan ad\u0131m, sonra her ince ad\u0131m\u0131n son kalan\u0131n ne oldu\u011funu temizlemesine izin verin. Bu de\u011fi\u015f toku\u015f k\u00f6rd\u00fcr: kaba \u00f6\u011f\u00fctme h\u0131zl\u0131d\u0131r ancak en derin hasar\u0131 b\u0131rak\u0131r, bu nedenle bitirme b\u00fct\u00e7esi, kal\u0131nl\u0131\u011f\u0131n ka\u00e7 mikron kald\u0131\u011f\u0131na g\u00f6re de\u011fil, hala ne kadar hasarl\u0131 silikonu \u00e7\u0131karman\u0131z gerekti\u011fine g\u00f6re belirlenir. Islak kimyasal inceltme \u00f6zel bir durumdur, bir \u00e7al\u0131\u015fma 3% tekd\u00fczeli\u011fi ile yakla\u015f\u0131k 800 \u00b5m\/dakika a\u015f\u0131nd\u0131rma oranlar\u0131 bildirir ve neredeyse hi\u00e7bir mekanik hasar b\u0131rakmad\u0131\u011f\u0131 i\u00e7in geri ta\u015flamaya kar\u015f\u0131 tala\u015f mukavemetini art\u0131rd\u0131\u011f\u0131n\u0131 belirtir (<a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/www.academia.edu\/55074874\/Wet_Chemical_Silicon_Wafer_Thinning_Process_for_High_Chip_Strength\" target=\"_blank\" rel=\"nofollow noopener\">islak-kimyasal inceltme \u00e7al\u0131\u015fmas\u0131<\/a>).<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">Ad\u0131m Ad\u0131m Geri Ta\u015flama<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6527\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/4-9.webp\" alt=\"Ad\u0131m Ad\u0131m Geri Ta\u015flama\" width=\"512\" height=\"512\" title=\"\" srcset=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/4-9.webp 512w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/4-9-300x300.png 300w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/4-9-150x150.webp 150w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/4-9-12x12.webp 12w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/4-9-500x500.webp 500w\" sizes=\"auto, (max-width: 512px) 100vw, 512px\" \/><\/p>\n<h3 style=\"margin: 32px 0 12px;\">Gofret geri ta\u015flama nedir?<\/h3>\n<p style=\"margin: 0 0 16px;\">Gofret geri ta\u015flama, bitmi\u015f bir gofretin arka taraf\u0131n\u0131n, desenli \u00f6n taraf korunurken d\u00f6nen bir elmas tekerlek ile toprakland\u0131\u011f\u0131 mekanik inceltme ad\u0131m\u0131d\u0131r. \u0130lk olarak, devreleri korumak ve ta\u015flama bulamac\u0131n\u0131 ve d\u00f6k\u00fcnt\u00fclerini d\u0131\u015far\u0131da tutmak i\u00e7in cihaz taraf\u0131na UV ile k\u00fcrlenebilen bir geri ta\u015flama band\u0131 lamine edilir <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/en.wikipedia.org\/wiki\/Wafer_backgrinding\" target=\"_blank\" rel=\"nofollow noopener\">geri ta\u015flama referans\u0131<\/a> a\u00e7\u0131klar. Daha sonra vakumlu bir ayna \u00fczerinde tutulur ve a\u015famal\u0131 olarak \u00f6\u011f\u00fct\u00fcl\u00fcr, kirlenmeyi \u00f6nlemek i\u00e7in s\u00fcrekli olarak deiyonize suyla y\u0131kan\u0131r.<\/p>\n<p style=\"margin: 0 0 16px;\">Tipik bir backgrind dizisi \u00fc\u00e7 a\u015famadan ge\u00e7er:<\/p>\n<ol style=\"margin: 16px 0; padding-left: 22px;\">\n<li style=\"padding: 4px 0;\"><strong>Kaba \u00f6\u011f\u00fctmek<\/strong>d\u00fc\u015f\u00fck taneli bir tekerlek, silikonun b\u00fcy\u00fck k\u0131sm\u0131n\u0131 h\u0131zla uzakla\u015ft\u0131rarak p\u00fcr\u00fczl\u00fc, hasarl\u0131 bir y\u00fczey b\u0131rak\u0131r.<\/li>\n<li style=\"padding: 4px 0;\"><strong>\u0130nce \u00f6\u011f\u00fctme<\/strong>daha y\u00fcksek taneli bir tekerlek, y\u00fczeyi iyile\u015ftirir ve levha boyunca tekd\u00fczeli\u011fi iyile\u015ftirir, ancak yine de bir y\u00fczey alt\u0131 hasar katman\u0131 b\u0131rak\u0131r.<\/li>\n<li style=\"padding: 4px 0;\"><strong>Stres rahatlama<\/strong>CMP, kuru a\u015f\u0131nd\u0131rma veya \u0131slak a\u015f\u0131nd\u0131rma, kal\u0131p mukavemetini geri kazanmak ve son TTV'ye \u00e7arpmak i\u00e7in hasarl\u0131 katman\u0131 kald\u0131r\u0131r.<\/li>\n<\/ol>\n<div style=\"margin: 24px 0; padding: 16px 20px; background: #f5f5f5; border: 1px solid #e0e0e0; border-left: 3px solid #2d2d2d;\"><strong>\ud83d\udcd0 M\u00fchendislik Notu<\/strong><\/p>\n<p style=\"margin: 8px 0 0;\">Ta\u015flama \u00e7ark\u0131ndaki kum ilerlemesi tipik olarak kaba bir \u00e7arktan (#320\u2013#360 civar\u0131nda) ince bir \u00e7arka (#2000 ve daha ince) kadar uzan\u0131r, tekerlek y\u00fcksek h\u0131zl\u0131 bir mil \u00fczerine monte edilmi\u015ftir.Daha ince son tekerlekler, stres giderme ad\u0131m\u0131n\u0131n \u00e7\u0131kar\u0131lmas\u0131 i\u00e7in daha s\u0131\u011f y\u00fczey alt\u0131 hasar\u0131 b\u0131rak\u0131r, ancak daha ince tekerlekler malzemeyi yava\u015f\u00e7a \u00e7\u0131kar\u0131r, bu nedenle kaba ad\u0131m a\u011f\u0131r kald\u0131rma i\u015flemini ger\u00e7ekle\u015ftirir. Temel kural: ince \u00f6\u011f\u00fctme ve stres giderme b\u00fct\u00e7esi, hala \u00e7\u0131karman\u0131z gereken kal\u0131nl\u0131\u011fa g\u00f6re de\u011fil, kald\u0131rman\u0131z gereken hasar derinli\u011fine g\u00f6re ayarlanmal\u0131d\u0131r.<\/p>\n<\/div>\n<p style=\"margin: 0 0 16px;\">Uygulamada, geri ta\u015flama hem en yayg\u0131n inceltme y\u00f6ntemi hem de en b\u00fcy\u00fck mekanik gerilim kayna\u011f\u0131d\u0131r, bu nedenle gerilim giderme a\u015famas\u0131n\u0131 atlamak, bir inceltme hatt\u0131n\u0131n yapabilece\u011fi en yayg\u0131n ve en pahal\u0131 hatalardan biridir.<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">TAIKO vs Tam Y\u00fcz Ta\u015flama: \u0130nce Gofretler i\u00e7in Kenar Tutma<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6528\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/5-9.png\" alt=\"TAIKO vs Tam Y\u00fcz Ta\u015flama: \u0130nce Gofretler i\u00e7in Kenar Tutma\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<p style=\"margin: 0 0 16px;\">Tamamen \u00f6\u011f\u00fct\u00fclm\u00fc\u015f ince bir levha her yerde k\u0131r\u0131lgand\u0131r, ancak en k\u0131r\u0131lgan olan\u0131 kenardad\u0131r. Standart e\u011fimli bir kenar\u0131 ince \u00f6\u011f\u00fctt\u00fc\u011f\u00fcn\u00fczde, yuvarlak profil neredeyse b\u0131\u00e7ak kenar\u0131na yak\u0131n bir uca d\u00f6n\u00fc\u015f\u00fcr \u2014 bir s\u00fcre\u00e7 y\u00f6neticisinin koydu\u011fu gibi \u201ctemelde ideal bir d\u00fcnyada sadece bir atom\u201d <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/semiengineering.com\/the-rise-of-thin-wafer-processing\/\" target=\"_blank\" rel=\"nofollow noopener\">Yar\u0131iletken M\u00fchendisli\u011fi<\/a>. Bu kenar kolayca yongalan\u0131r ve bir kenar yongas\u0131, t\u00fcm levha boyunca uzanan bir \u00e7atlak ba\u015flatabilir.<\/p>\n<p style=\"margin: 0 0 16px;\">Bunu iki strateji y\u00f6netiyor:<\/p>\n<div style=\"display: flex; flex-wrap: wrap; gap: 16px; margin: 24px 0;\">\n<div style=\"flex: 1; min-width: 280px; padding: 20px; background: #f5f5f5; border: 1px solid #e0e0e0; border-top: 3px solid #2d2d2d;\"><strong style=\"display: block; margin-bottom: 12px;\">\u2714 TAIKO (kenar halkas\u0131 tutma)<\/strong><\/p>\n<ul style=\"margin: 0; padding-left: 18px;\">\n<li style=\"padding: 3px 0;\">Merkezi inceltirken topraklanmam\u0131\u015f bir d\u0131\u015f halka (~3 mm) b\u0131rak\u0131r.<\/li>\n<li style=\"padding: 3px 0;\">Bu halka yerle\u015fik bir sertle\u015ftirici g\u00f6revi g\u00f6r\u00fcr, b\u00f6ylece levha a\u015fa\u011f\u0131 y\u00f6ndeki i\u015flemler s\u0131ras\u0131nda k\u0131vr\u0131lmaya ve b\u00fck\u00fclmeye kar\u015f\u0131 dayan\u0131kl\u0131 olur.<\/li>\n<li style=\"padding: 3px 0;\">Genellikle ayr\u0131 bir ta\u015f\u0131y\u0131c\u0131 levha ihtiyac\u0131n\u0131 azalt\u0131r veya ortadan kald\u0131r\u0131r.<\/li>\n<\/ul>\n<\/div>\n<div style=\"flex: 1; min-width: 280px; padding: 20px; background: #f5f5f5; border: 1px solid #e0e0e0; border-top: 3px solid #6b7280;\"><strong style=\"display: block; margin-bottom: 12px;\">\u26a0 Tam y\u00fcz \u00f6\u011f\u00fctme + kenar d\u00fczeltme<\/strong><\/p>\n<ul style=\"margin: 0; padding-left: 18px;\">\n<li style=\"padding: 3px 0;\">T\u00fcm arka y\u00fcz\u00fc \u00f6\u011f\u00fct\u00fcr, ard\u0131ndan kenar d\u00fczeltme kenara bir ad\u0131m atar.<\/li>\n<li style=\"padding: 3px 0;\">Bu kenar kesme ad\u0131m\u0131 en az\u0131ndan son levha kal\u0131nl\u0131\u011f\u0131 kadar derin olmal\u0131d\u0131r.<\/li>\n<li style=\"padding: 3px 0;\">Tam alan\u0131n inceltilmesi gerekti\u011finde ihtiya\u00e7 duyulur (\u00f6rne\u011fin, \u00fcniforma TSV ortaya \u00e7\u0131karmak).<\/li>\n<\/ul>\n<\/div>\n<\/div>\n<p style=\"margin: 0 0 16px;\">Kenar halkas\u0131 sadece bir i\u015flem hilesi de\u011fil, belgelenmi\u015f bir tasar\u0131md\u0131r. Verilen bir patent, geri ta\u015flaman\u0131n \u201ckalay\u0131n k\u0131vr\u0131lmas\u0131n\u0131 veya i\u015fleme s\u0131ras\u0131nda ba\u015fka \u015fekilde b\u00fck\u00fclmesini \u00f6nlemeye yard\u0131mc\u0131 olabilecek, \u00e7\u0131kar\u0131lmam\u0131\u015f malzemeden (TAIKO halkas\u0131) bir halka b\u0131rakt\u0131\u011f\u0131n\u0131\u201d belirtmektedir (<a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/patents.google.com\/patent\/US10600736B2\/en\" target=\"_blank\" rel=\"nofollow noopener\">USPTO US10600736B2<\/a>). TAIKO \u00f6\u011f\u00fctme, orijinal olarak DISCO taraf\u0131ndan adland\u0131r\u0131lm\u0131\u015f bir kenar tutma i\u015flemi olarak geli\u015ftirildi, bu nedenle \u00f6\u011f\u00fctme ile e\u015fanlaml\u0131 de\u011fildir; bu, ince bir kullan\u0131lamaz silikon halkas\u0131n\u0131 \u00e7ok daha sert, i\u015flenebilir bir levha ile de\u011fi\u015ftiren farkl\u0131 bir kenar tutma stratejisidir.<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">Boyuta ve Cihaza G\u00f6re Hedef Gofret Kal\u0131nl\u0131\u011f\u0131<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6529\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/6-9.png\" alt=\"Boyuta ve Cihaza G\u00f6re Hedef Gofret Kal\u0131nl\u0131\u011f\u0131\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<h3 style=\"margin: 32px 0 12px;\">Tipik gofret kal\u0131nl\u0131\u011f\u0131 nedir?<\/h3>\n<p style=\"margin: 0 0 16px;\">Daha b\u00fcy\u00fck levhalar\u0131n d\u00fcz kalmas\u0131 ve kullan\u0131mda hayatta kalmas\u0131 i\u00e7in SEMI spesifikasyonlar\u0131 alt\u0131nda tan\u0131mlanan levha \u00e7apl\u0131 standart ba\u015flang\u0131\u00e7 kal\u0131nl\u0131\u011f\u0131 \u00f6l\u00e7ekleri Referans olarak, ana silikon levhalar 100 mm'de kabaca 525 \u00b5m, 150 mm'de 625\u2013675 \u00b5m ve 200\u2013300 mm'de 725\u2013775 \u00b5m \u00e7al\u0131\u015f\u0131r. Bunlar <em>gelen<\/em> kal\u0131nl\u0131klar; inceltilmi\u015f hedef, yukar\u0131da a\u00e7\u0131kland\u0131\u011f\u0131 gibi mikrometre kontroll\u00fc bir fikst\u00fcrle alet \u00fczerine yerle\u015ftirilen, cihazla \u00e7al\u0131\u015ft\u0131r\u0131lan ayr\u0131 bir karard\u0131r <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/vcsel.mntl.illinois.edu\/research\/wafer_thinning_polishing\/\" target=\"_blank\" rel=\"nofollow noopener\">Illinois \u00dcniversitesi inceltme ve cilalama notlar\u0131<\/a>.<\/p>\n<div style=\"margin: 24px 0; overflow-x: auto;\">\n<table style=\"width: 100%; border-collapse: collapse; border: 1px solid #e0e0e0;\">\n<caption style=\"caption-side: top; text-align: left; font-weight: 600; padding: 8px 0; color: #2d2d2d;\">Gofret \u00e7ap\u0131na g\u00f6re referans ba\u015flang\u0131\u00e7 kal\u0131nl\u0131\u011f\u0131 ve cihaz s\u0131n\u0131f\u0131na g\u00f6re tipik inceltilmi\u015f hedef.<\/caption>\n<thead>\n<tr style=\"background: #2d2d2d; color: #ffffff;\">\n<th style=\"padding: 12px 16px; text-align: left; font-weight: 600;\" scope=\"col\">Gofret \/ cihaz<\/th>\n<th style=\"padding: 12px 16px; text-align: left; font-weight: 600;\" scope=\"col\">Ba\u015flang\u0131\u00e7 kal\u0131nl\u0131\u011f\u0131<\/th>\n<th style=\"padding: 12px 16px; text-align: left; font-weight: 600;\" scope=\"col\">Tipik inceltilmi\u015f hedef<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">100 mm (4\u2033)<\/td>\n<td style=\"padding: 12px 16px;\">~525 \u00b5m<\/td>\n<td style=\"padding: 12px 16px;\">200\u2013300 \u00b5m<\/td>\n<\/tr>\n<tr style=\"background: #f5f5f5; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">150 mm (6\u2033)<\/td>\n<td style=\"padding: 12px 16px;\">~625\u2013675 \u00b5m<\/td>\n<td style=\"padding: 12px 16px;\">150\u2013250 \u00b5m<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">200 mm (8\u2033)<\/td>\n<td style=\"padding: 12px 16px;\">~725 \u00b5m<\/td>\n<td style=\"padding: 12px 16px;\">100\u2013200 \u00b5m<\/td>\n<\/tr>\n<tr style=\"background: #f5f5f5; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">300 mm (12\u2033)<\/td>\n<td style=\"padding: 12px 16px;\">~775 \u00b5m<\/td>\n<td style=\"padding: 12px 16px;\">50\u2013100 \u00b5m<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">Mant\u0131k \/ ana ak\u0131m IC<\/td>\n<td style=\"padding: 12px 16px;\">\u2014<\/td>\n<td style=\"padding: 12px 16px;\">~100\u2013300 \u00b5m<\/td>\n<\/tr>\n<tr style=\"background: #f5f5f5; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">Bellek \/ 3D \/ HBM<\/td>\n<td style=\"padding: 12px 16px;\">\u2014<\/td>\n<td style=\"padding: 12px 16px;\">&lt;50 \u00b5m<\/td>\n<\/tr>\n<tr style=\"border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">G\u00fc\u00e7 cihazlar\u0131<\/td>\n<td style=\"padding: 12px 16px;\">\u2014<\/td>\n<td style=\"padding: 12px 16px;\">~50\u2013150 \u00b5m<\/td>\n<\/tr>\n<tr style=\"background: #f5f5f5; border-bottom: 1px solid #e0e0e0;\">\n<td style=\"padding: 12px 16px;\">Ak\u0131ll\u0131 kart \/ esnek<\/td>\n<td style=\"padding: 12px 16px;\">\u2014<\/td>\n<td style=\"padding: 12px 16px;\">20\u201375 \u00b5m<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p style=\"margin: 8px 0 0; font-size: 0.9em; color: #6b7280;\">Ba\u015flang\u0131\u00e7 kal\u0131nl\u0131klar\u0131 SEMI prime-wafer referanslar\u0131n\u0131 takip eder; inceltilmi\u015f hedefler tipik end\u00fcstri aral\u0131klar\u0131d\u0131r ve cihaza ve paketleme \u015femas\u0131na g\u00f6re de\u011fi\u015fir. Montaj evinizle tam hedefi onaylay\u0131n.<\/p>\n<\/div>\n<div style=\"margin: 24px 0; padding: 20px 24px; background: #f5f5f5; border: 1px solid #e0e0e0; border-top: 3px solid #2d2d2d;\"><strong style=\"display: block; margin-bottom: 12px;\">\u0130ncelenmi\u015f Bir Hedef Belirlerken Temel Fakt\u00f6rler<\/strong><\/p>\n<ol style=\"padding-left: 20px; margin: 0;\">\n<li style=\"padding: 4px 0;\">Paketleme \u015femas\u0131 ilk olarak, 3D\/HBM istifleme kuvvetleri &lt;50 \u00b5m; tek kal\u0131pl\u0131 bir paketin yaln\u0131zca 200 \u00b5m&#039;ye ihtiyac\u0131 olabilir.<\/li>\n<li style=\"padding: 4px 0;\">Ta\u015f\u0131ma kapasitesi, ~100 \u00b5m'nin alt\u0131nda genellikle bir ta\u015f\u0131y\u0131c\u0131ya ve TAIKO'ya veya ge\u00e7ici ba\u011flamaya ihtiyac\u0131n\u0131z vard\u0131r.<\/li>\n<li style=\"padding: 4px 0;\">Termal ve elektriksel hedefler, g\u00fc\u00e7 ve RF par\u00e7alar\u0131 direnci kesmek ve \u0131s\u0131 ak\u0131\u015f\u0131n\u0131 iyile\u015ftirmek i\u00e7in incedir.<\/li>\n<li style=\"padding: 4px 0;\">Verim tavan bo\u015flu\u011fu, ger\u00e7ek gereksiniminizin alt\u0131ndaki her mikron, hi\u00e7bir fayda sa\u011flamadan k\u0131r\u0131lma riski ekler.<\/li>\n<\/ol>\n<\/div>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">Verime Karar Veren Kalite Metrikleri: TTV, Yeralt\u0131 Hasar\u0131 ve Kal\u0131p Dayan\u0131m\u0131<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6530\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/7-10.png\" alt=\"Verime Karar Veren Kalite Metrikleri: TTV, Yeralt\u0131 Hasar\u0131 ve Kal\u0131p Dayan\u0131m\u0131\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<p style=\"margin: 0 0 16px;\"><strong>\u0130ncelenmi\u015f bir levhan\u0131n iyi bir kal\u0131p haline gelip gelmeyece\u011fine \u00fc\u00e7 say\u0131 karar verir: toplam kal\u0131nl\u0131k de\u011fi\u015fimi (TTV), y\u00fczey alt\u0131 hasar derinli\u011fi ve kal\u0131p k\u0131r\u0131lma mukavemeti.<\/strong> Onlara vurun ve levha zar atmaktan, yap\u0131\u015ft\u0131rmaktan ve paketlemeden kurtulur; onlar\u0131 ka\u00e7\u0131r\u0131rsan\u0131z \u00e7atlaklar, \u00e7arp\u0131kl\u0131klar ve verim kayb\u0131 ya\u015fars\u0131n\u0131z.<\/p>\n<p style=\"margin: 0 0 16px;\"><strong>TTV<\/strong> lazer interferometre ile y\u00fczlerce noktada \u00f6l\u00e7\u00fclen, bir levha \u00fczerindeki en kal\u0131n ve en ince noktalar aras\u0131ndaki farkt\u0131r. Bu, man\u015fet kalite \u00f6l\u00e7\u00fcs\u00fcd\u00fcr ve ba\u011fl\u0131 \u00e7iftteki her katmandan yukar\u0131 do\u011fru istiflenir. Yar\u0131 \u0130letken M\u00fchendisli\u011fi'nde bildirildi\u011fi gibi, tek ba\u015f\u0131na bir cam ta\u015f\u0131y\u0131c\u0131 yakla\u015f\u0131k 1 \u00b5m, yap\u0131\u015ft\u0131rma yap\u0131\u015ft\u0131r\u0131c\u0131s\u0131 birka\u00e7 \u00b5m daha katk\u0131da bulunabilir ve yakla\u015f\u0131k 2 \u00b5m ta\u015flayabilir, bu nedenle inceltilmi\u015f bir cihaz levhas\u0131 genellikle i\u015flemin kontrol etmesi gereken kabaca 5 \u00b5m toplam varyasyon ta\u015f\u0131r.<\/p>\n<p style=\"margin: 0 0 16px;\">\u0130\u015fte mant\u0131\u011fa ayk\u0131r\u0131 k\u0131s\u0131m, dedi\u011fimiz \u015fey <strong>kal\u0131nl\u0131ktan Mukavemete E\u011frisi<\/strong>: Daha ince bir levha <em>de\u011fil<\/em> otomatik olarak daha g\u00fc\u00e7l\u00fc bir. Ta\u015flama, mikro \u00e7atlaklardan olu\u015fan bir y\u00fczey alt\u0131 hasar tabakas\u0131 b\u0131rak\u0131r ve bu kusurlar silikonun k\u0131r\u0131lma mukavemetini azalt\u0131r. \u00dczerine ara\u015ft\u0131rma <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/ui.adsabs.harvard.edu\/abs\/2018AIPA....8e5223Z\/abstract\" target=\"_blank\" rel=\"nofollow noopener\">yeralt\u0131 hasar katman\u0131ndaki silikonun mekanik \u00f6zellikleri<\/a> kal\u0131b\u0131n ne kadar y\u00fck alabilece\u011fini toplu kal\u0131nl\u0131\u011f\u0131n de\u011fil hasarl\u0131 y\u00fczeyin y\u00f6netti\u011fini g\u00f6sterir. Bu nedenle bitirme \u00f6nemlidir: hasarl\u0131 katman\u0131n CMP ile \u00e7\u0131kar\u0131lmas\u0131 veya a\u015f\u0131nd\u0131r\u0131lmas\u0131, arka plan y\u00fczeyinin oldu\u011fu gibi b\u0131rak\u0131lmas\u0131yla kar\u015f\u0131la\u015ft\u0131r\u0131ld\u0131\u011f\u0131nda tala\u015f mukavemetini \u00f6l\u00e7\u00fclebilir \u015fekilde art\u0131r\u0131r.<\/p>\n<div style=\"margin: 24px 0; padding: 16px 20px; background: #f5f5f5; border: 1px solid #e0e0e0; border-left: 3px solid #2d2d2d;\"><strong>\ud83d\udcd0 M\u00fchendislik Notu<\/strong><\/p>\n<p style=\"margin: 8px 0 0;\">Spec yeralt\u0131 hasar\u0131 derinli\u011fi, sadece son kal\u0131nl\u0131k de\u011fil.50 \u00b5m'ye kadar bir levha \u00f6\u011f\u00fct\u00fclm\u00fc\u015f ancak birka\u00e7 mikron \u00e7atlak ba\u011fc\u0131kl\u0131 y\u00fczey alt\u0131 hasar\u0131 ta\u015f\u0131yan bir levha, CMP veya kuru a\u015f\u0131nd\u0131rma ile gerilimi giderilmi\u015f 70 \u00b5m'lik bir levhadan daha zay\u0131f olabilir. \u0130nceltme spesifikasyonu yazd\u0131\u011f\u0131n\u0131zda, yaln\u0131zca kal\u0131nl\u0131k numaras\u0131n\u0131 de\u011fil, gerilim giderme ad\u0131m\u0131n\u0131 ve hedef y\u00fczey kaplamas\u0131n\u0131 da s\u00f6yleyin.<\/p>\n<\/div>\n<p style=\"margin: 0 0 16px;\">\u00c7o\u011fu alan ar\u0131zas\u0131 kenarda ve y\u00fczeyde k\u00fcmelenir: tam \u00e7atlaklara yay\u0131lan kenar ufalanmas\u0131, i\u00e7 gerilimden kaynaklanan \u00e7arp\u0131kl\u0131k ve ta\u015f\u0131y\u0131c\u0131 aray\u00fcz\u00fcnde katmanlara ayr\u0131lma. Bunlar\u0131n her biri sonradan akla gelen bir d\u00fc\u015f\u00fcnce de\u011fil, bir kalite kontrol kontrol noktas\u0131d\u0131r.<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">\u0130nce Gofret Ta\u015f\u0131ma: Bant, Ta\u015f\u0131y\u0131c\u0131 ve Ge\u00e7ici Yap\u0131\u015ft\u0131rma<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6531\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/8-8.png\" alt=\"\u0130nce Gofret Ta\u015f\u0131ma: Bant, Ta\u015f\u0131y\u0131c\u0131 ve Ge\u00e7ici Yap\u0131\u015ft\u0131rma\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<p style=\"margin: 0 0 16px;\">Yakla\u015f\u0131k 100 \u00b5m'nin alt\u0131nda inceltilmi\u015f bir levha esnek ve k\u0131r\u0131lgand\u0131r ve bir kez \u00e7atlad\u0131\u011f\u0131nda kurtar\u0131lamaz hale gelir. Saha m\u00fchendisleri ar\u0131za modunu a\u00e7\u0131k bir \u015fekilde tan\u0131mlad\u0131lar, bir uygulay\u0131c\u0131 yeni bir aleti \u00e7evirirken 80 \u00b5m'lik bir levhay\u0131 k\u0131rd\u0131\u011f\u0131n\u0131 ve ard\u0131ndan ta\u015f\u0131ma robotlar\u0131n\u0131n art\u0131k onu hi\u00e7 alamad\u0131\u011f\u0131n\u0131 anlatt\u0131. Bu nedenle ta\u015f\u0131ma, ta\u015flaman\u0131n kendisi kadar dikkatli bir \u015fekilde tasarlanm\u0131\u015ft\u0131r.<\/p>\n<p style=\"margin: 0 0 16px;\">\u00dc\u00e7 ta\u015f\u0131ma rotas\u0131 hakimdir:<\/p>\n<ul style=\"margin: 16px 0; padding-left: 22px;\">\n<li style=\"padding: 4px 0;\"><strong>Geri ta\u015flama band\u0131<\/strong>\u00f6n taraf\u0131 korur ve ta\u015flama yoluyla gofreti destekler.<\/li>\n<li style=\"padding: 4px 0;\"><strong>TAIKO kenar halkas\u0131<\/strong>topraklanmam\u0131\u015f jant, levhay\u0131 ayr\u0131 bir ta\u015f\u0131y\u0131c\u0131 olmadan sert tutar (yukar\u0131ya bak\u0131n).<\/li>\n<li style=\"padding: 4px 0;\"><strong>Bir ta\u015f\u0131y\u0131c\u0131ya ge\u00e7ici ba\u011flanma<\/strong>cihaz levhas\u0131 bir yap\u0131\u015ft\u0131r\u0131c\u0131yla bir silikon veya cam ta\u015f\u0131y\u0131c\u0131ya ba\u011flan\u0131r, i\u015flenir ve daha sonra ba\u011flanmas\u0131 belgelenen bir ta\u015f\u0131ma yolu ile a\u00e7\u0131l\u0131r <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/vcsel.mntl.illinois.edu\/research\/wafer_thinning_polishing\/\" target=\"_blank\" rel=\"nofollow noopener\">\u00fcniversite laboratuvar\u0131 notlar\u0131n\u0131 inceltiyor<\/a>.<\/li>\n<\/ul>\n<p style=\"margin: 0 0 16px;\">Ta\u015f\u0131y\u0131c\u0131 se\u00e7imi ger\u00e7ek bir de\u011fi\u015f toku\u015f.cam lazer ba\u011f \u00e7\u00f6zme i\u00e7in UV\/IR iletir ve termal genle\u015fmesi silikona yak\u0131n ayarlanabilir; silikon ta\u015f\u0131y\u0131c\u0131lar silikonun geni\u015flemesiyle tam olarak e\u015fle\u015fir ve Yar\u0131 \u0130letken M\u00fchendisli\u011fi'ne g\u00f6re e\u015fde\u011fer bir cam ta\u015f\u0131y\u0131c\u0131n\u0131n maliyetinin kabaca yar\u0131s\u0131 kadar belirli bir TTV'ye ula\u015fabilir.\u0130\u015flemden sonra \u00e7ift, termal slayt, kimyasal \u00e7\u00f6z\u00fcnme, mekanik kald\u0131rma veya 20 \u00b5m'nin alt\u0131ndaki en ince levhalar i\u00e7in, saatte yakla\u015f\u0131k 20\u201330 levha ile \u00e7al\u0131\u015fan lazer ablasyon veya fotonik ba\u011f \u00e7\u00f6zme ile ayr\u0131l\u0131r. \u00c7ok d\u00fc\u015f\u00fck stresli ta\u015f\u0131y\u0131c\u0131lar genellikle maliyeti kontrol etmek i\u00e7in yakla\u015f\u0131k 10 kata kadar yeniden kullan\u0131l\u0131r.<\/p>\n<div style=\"margin: 24px 0; padding: 16px 20px; background: #f5f5f5; border: 1px solid #e0e0e0; border-left: 3px solid #2d2d2d;\">\n<div style=\"display: flex; align-items: center; gap: 8px; margin-bottom: 8px;\"><span style=\"font-size: 1.1em;\">\u26a0\ufe0f<\/span> <strong>\u00d6nemli<\/strong><\/div>\n<p style=\"margin: 0;\">Ge\u00e7ici yap\u0131\u015ft\u0131r\u0131c\u0131 yap\u0131\u015ft\u0131r\u0131c\u0131y\u0131 en s\u0131cak a\u015fa\u011f\u0131 ak\u0131\u015f ad\u0131m\u0131n\u0131zla e\u015fle\u015ftirin. Bir\u00e7ok yap\u0131\u015ft\u0131r\u0131c\u0131 yakla\u015f\u0131k 250 \u00b0C'nin \u00fczerine \u00e7\u0131kar, yaln\u0131zca birka\u00e7\u0131 350 \u00b0C'de hayatta kal\u0131r ve bunun \u00fczerinde \u00f6n u\u00e7 uyumlu inorganik ba\u011flamaya ihtiya\u00e7 vard\u0131r. S\u0131cakl\u0131kta ba\u015far\u0131s\u0131z olan bir yap\u0131\u015ft\u0131r\u0131c\u0131 \u00e7arp\u0131kl\u0131k veya bo\u015fluklar ve ard\u0131ndan \u00e7atlaklar olarak ortaya \u00e7\u0131kar.<\/p>\n<\/div>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">Dilimleme Kalitesi Zemini \u0130nceltme \u0130\u00e7in Nas\u0131l Ayarl\u0131yor<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6532\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/9-8.png\" alt=\"Dilimleme Kalitesi Zemini \u0130nceltme \u0130\u00e7in Nas\u0131l Ayarl\u0131yor\" width=\"512\" height=\"512\" title=\"\"><\/p>\n<p style=\"margin: 0 0 16px;\">\u0130\u015fte k\u0131lavuzlar\u0131n en \u00e7ok inceltildi\u011fi k\u0131s\u0131m ve tel testere \u00fcreticisi olarak en net g\u00f6rd\u00fc\u011f\u00fcm\u00fcz k\u0131s\u0131m. <strong>\u0130nce oldu\u011funuz gofret, ancak ba\u015flad\u0131\u011f\u0131n\u0131z dilim kadar iyidir<\/strong>buna \u015funu deyin <strong>Dilim-Zemin Prensibi<\/strong>. \u0130nceltme malzemeyi ortadan kald\u0131r\u0131r; orijinal kesimin b\u0131rakt\u0131\u011f\u0131 kal\u0131nl\u0131k de\u011fi\u015fimini, testere izlerini veya y\u00fczey alt\u0131 hasar\u0131n\u0131 silmez. Dilimlenmi\u015f levha y\u00fcksek TTV veya derin testere hasar\u0131 katman\u0131yla gelirse, inceltme hatt\u0131 t\u00fcm b\u00fct\u00e7esini sadece yeti\u015fmek i\u00e7in harcar.<\/p>\n<p style=\"margin: 0 0 16px;\">Bu her y\u0131l daha \u00f6nemli \u00e7\u00fcnk\u00fc dilimlemenin kendisi daha da inceltiliyor. 2025 y\u0131l\u0131nda yap\u0131lan bir incelemede <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/www.sciencedirect.com\/science\/article\/abs\/pii\/S1369800125009485\" target=\"_blank\" rel=\"nofollow noopener\">i\u0307nce yar\u0131 iletken levhalar\u0131n dilimlenmesi<\/a>, ara\u015ft\u0131rmac\u0131lar, ince levha talebini a\u015fa\u011f\u0131 y\u00f6nde beslemek i\u00e7in daha ince levhalara ve daha ince elmas tellere do\u011fru geli\u015fen teknolojiyi tan\u0131ml\u0131yor. Ayn\u0131 mant\u0131k silikonun \u00f6tesinde de ge\u00e7erli: silisyum karb\u00fcr (SiC) ve GaAs gibi bile\u015fik alt tabakalar da inceltilmi\u015f ve 200 mm ve 300 mm \u00fcretim hatlar\u0131nda dilim kalitesi hala tavan\u0131 belirliyor. Elmas \u00fczerinde 10.000'den fazla kesme kutusunda kendi deneyimimizde <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/high-tech-precision\/silicon-wafer-cutting-wire-saw\/\" target=\"_blank\">silikon gofret kesme teli testereleri<\/a>, daha s\u0131k\u0131, daha d\u00fc\u015f\u00fck bir TTV dilimi, ta\u015flama ve CMP ad\u0131mlar\u0131na daha fazla bo\u015fluk pay\u0131, \u00e7\u0131kar\u0131lacak daha az malzeme, kovalamacada daha s\u0131\u011f hasar ve trim i\u00e7in daha az kenar kusuru sa\u011flar.<\/p>\n<p style=\"margin: 0 0 16px;\">Al\u0131c\u0131lar i\u00e7in pratik paket: dilimleme ve inceltmeyi ayr\u0131 sat\u0131n alma kararlar\u0131 olarak ele almay\u0131n Bizim gibi s\u0131k\u0131 TTV ve minimum yeralt\u0131 hasar\u0131 tutan bir elmas tel testere <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/high-tech-precision\/sic-wafer-cutting-saw\/\" target=\"_blank\">SiC gofret kesme testereleri<\/a> ve <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/applications\/precision-diamond-wire-saw\/\" target=\"_blank\">hassas elmas tel testereler<\/a>i\u0307nceltme hatt\u0131n\u0131z\u0131n ba\u015farabilece\u011fi tavan\u0131 y\u00fckseltir. Yukar\u0131 ak\u0131\u015f malzemesi taraf\u0131nda daha fazlas\u0131 i\u00e7in k\u0131lavuzumuza bak\u0131n <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/blog\/silicon-wafer-material\/\" target=\"_blank\">silikon gofret malzemesi<\/a>.<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">G\u00f6r\u00fcn\u00fcm: Ultra \u0130nce Gofretler, 450 mm ve Daha \u0130nce \u0130nce Dilimleme<\/h2>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6533\" src=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/10-5.webp\" alt=\"G\u00f6r\u00fcn\u00fcm: Ultra \u0130nce Gofretler, 450 mm ve Daha \u0130nce \u0130nce Dilimleme\" width=\"512\" height=\"512\" title=\"\" srcset=\"https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/10-5.webp 512w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/10-5-300x300.webp 300w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/10-5-150x150.webp 150w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/10-5-12x12.webp 12w, https:\/\/wiresawcutter.com\/wp-content\/uploads\/2026\/06\/10-5-500x500.webp 500w\" sizes=\"auto, (max-width: 512px) 100vw, 512px\" \/><\/p>\n<p style=\"margin: 0 0 16px;\">Seyahat y\u00f6n\u00fc gofret \u00fcreticileri taraf\u0131ndan de\u011fil, ambalajlama taraf\u0131ndan belirlenir.3D ve heterojen entegrasyon, y\u00fcksek bant geni\u015fli\u011fine sahip bellekten ana ak\u0131m mant\u0131\u011fa yay\u0131ld\u0131k\u00e7a, 50 \u00b5m'nin alt\u0131nda ve giderek 20 \u00b5m'nin alt\u0131nda kal\u0131p, egzotik bir gereksinim olmaktan ziyade rutin bir gereksinim haline gelir. A\u015fa\u011f\u0131daki her de\u011fi\u015fikli\u011fin arkas\u0131ndaki y\u00fck ta\u015f\u0131yan s\u00fcr\u00fcc\u00fc bu taleptir; s\u0131kl\u0131kla al\u0131nt\u0131lanan geni\u015f pazar b\u00fcy\u00fcme rakamlar\u0131 (ince gofretler i\u00e7in orta tek haneli y\u0131ll\u0131k b\u00fcy\u00fcme, inceltme ve dilimleme ekipman\u0131 i\u00e7in daha y\u00fcksek) y\u00f6nl\u00fc arka pland\u0131r, ince gofretlerin nedeninin nedeni de\u011fildir. Talep ger\u00e7ek s\u00fcr\u00fcc\u00fcd\u00fcr: 3D ve g\u00fc\u00e7 cihaz\u0131 \u00fcreticileri 50 \u00b5m'nin alt\u0131nda kal\u0131ba ihtiya\u00e7 duyar ve bu \u00e7ekme, tak\u0131m yap\u0131c\u0131lar\u0131 dilimleme ve ta\u015flamay\u0131 daha ince itmeye zorlayan \u015feydir.<\/p>\n<p style=\"margin: 0 0 16px;\">\u0130zlemeye de\u011fer \u00fc\u00e7 vardiya:<\/p>\n<ul style=\"margin: 16px 0; padding-left: 22px;\">\n<li style=\"padding: 4px 0;\">Tamamen kuru, d\u00fc\u015f\u00fck hasarl\u0131 incelme: 2025'te yap\u0131lan bir \u00e7al\u0131\u015fma bunu g\u00f6steriyor <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/www.sciencedirect.com\/science\/article\/pii\/S2095809925006617\" target=\"_blank\" rel=\"nofollow noopener\">a\u015f\u0131r\u0131 tamamen kuru SOI levha inceltme<\/a> nano-tsv'lerle e\u015fle\u015ftirildi, en ince levhalardaki hasar\u0131 ve kirlili\u011fi azaltmak i\u00e7in \u0131slak ad\u0131mlar\u0131n yerini ald\u0131.<\/li>\n<li style=\"padding: 4px 0;\">Lazer ve fotonik ba\u011flar\u0131n \u00e7\u00f6z\u00fclmesi, daha uzun bellek y\u0131\u011f\u0131nlar\u0131 i\u00e7in giderek daha ince kal\u0131plar\u0131 i\u015flemek \u00fczere \u00f6l\u00e7ekleniyor.<\/li>\n<li style=\"padding: 4px 0;\">Standartlar hareket etmeye devam ediyor: SEMI'nin M1 levha spesifikasyonu ve 450 mm standartlar\u0131 revize edilmeye devam ediyor, bu da kal\u0131nl\u0131\u011f\u0131 s\u0131f\u0131rl\u0131yor ve al\u0131c\u0131lar\u0131n s\u00f6zle\u015fmelere yazd\u0131\u011f\u0131 TTV temel \u00e7izgileri.<\/li>\n<\/ul>\n<p style=\"margin: 0 0 16px;\"><strong>Bu konuda ne yapmal\u0131:<\/strong> 2026 ve sonras\u0131 i\u00e7in inceltici bir yol haritas\u0131 planlad\u0131\u011f\u0131n\u0131zda, dilimleme ve stres giderme ad\u0131mlar\u0131n\u0131z\u0131, arac\u0131n ula\u015fabilece\u011fi en ince hedef i\u00e7in de\u011fil, ger\u00e7ek\u00e7i olarak ihtiya\u00e7 duydu\u011funuz en ince hedef i\u00e7in nitelendirin ve \u00f6nce yukar\u0131 ak\u0131\u015f dilim kalitesini kilitleyin. Ekipman ortam\u0131 i\u00e7in genel bak\u0131\u015f\u0131m\u0131za bak\u0131n <a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/blog\/semiconductor-manufacturing-equipment\/\" target=\"_blank\">yar\u0131 iletken \u00fcretim ekipmanlar\u0131<\/a>.<\/p>\n<h2 style=\"margin: 48px 0 16px; padding-bottom: 10px; border-bottom: 2px solid #2d2d2d;\">S\u0131k\u00e7a Sorulan Sorular<\/h2>\n<div style=\"margin: 16px 0;\">\n<h3 style=\"margin: 0 0 4px;\">S: Gofret inceltme ne anlama geliyor?<\/h3>\n<details style=\"border: 1px solid #e0e0e0;\">\n<summary style=\"padding: 12px 20px; cursor: pointer; background: #f5f5f5; color: #6b7280;\">Cevab\u0131 G\u00f6r\u00fcnt\u00fcle<\/summary>\n<div style=\"padding: 12px 20px 16px;\">Gofret inceltme, devreleri yap\u0131ld\u0131ktan sonra bitmi\u015f bir yar\u0131 iletken gofretin kal\u0131nl\u0131\u011f\u0131n\u0131 genellikle yakla\u015f\u0131k 775 \u00b5m'den 75\u201350 \u00b5m veya daha az\u0131na d\u00fc\u015f\u00fcrmek anlam\u0131na gelir.\u00d6n taraftaki cihazlar lamine bant veya ba\u011fl\u0131 ta\u015f\u0131y\u0131c\u0131 gofret ile korunurken arka taraf ta\u015flan\u0131r, cilalan\u0131r ve kaz\u0131n\u0131r.\u0130nceltme, 3D istifleme, daha d\u00fc\u015f\u00fck paket y\u00fcksekli\u011fi, daha iyi \u0131s\u0131 giderme ve daha d\u00fc\u015f\u00fck elektrik kay\u0131plar\u0131 sa\u011flar ve arka u\u00e7 ak\u0131\u015f\u0131nda dilimleme ve dilimleme aras\u0131nda oturur.<\/div>\n<\/details>\n<\/div>\n<div style=\"margin: 16px 0;\">\n<h3 style=\"margin: 0 0 4px;\">S: Gofret geri ta\u015flama nedir?<\/h3>\n<details style=\"border: 1px solid #e0e0e0;\">\n<summary style=\"padding: 12px 20px; cursor: pointer; background: #f5f5f5; color: #6b7280;\">Cevab\u0131 G\u00f6r\u00fcnt\u00fcle<\/summary>\n<div style=\"padding: 12px 20px 16px;\">Gofret geri ta\u015flama, d\u00f6nen bir elmas tekerle\u011fin silikonu gofretin arkas\u0131ndan \u00e7\u0131kard\u0131\u011f\u0131 inceltmenin mekanik k\u0131sm\u0131d\u0131r. Ta\u015flama a\u015famalar halinde \u00e7al\u0131\u015f\u0131r \u2014 h\u0131z i\u00e7in kaba, daha sonra y\u00fczey kalitesi i\u00e7in ince \u2014 ve ard\u0131ndan CMP veya a\u015f\u0131nd\u0131rma gibi bir gerilim giderme ad\u0131m\u0131 gelir.<\/div>\n<\/details>\n<\/div>\n<div style=\"margin: 16px 0;\">\n<h3 style=\"margin: 0 0 4px;\">S: Tipik gofret kal\u0131nl\u0131\u011f\u0131 nedir?<\/h3>\n<details style=\"border: 1px solid #e0e0e0;\">\n<summary style=\"padding: 12px 20px; cursor: pointer; background: #f5f5f5; color: #6b7280;\">Cevab\u0131 G\u00f6r\u00fcnt\u00fcle<\/summary>\n<div style=\"padding: 12px 20px 16px;\">SEMI spesifikasyonlar\u0131na g\u00f6re \u00e7apa sahip standart ba\u015flang\u0131\u00e7 kal\u0131nl\u0131\u011f\u0131 \u00f6l\u00e7ekleri: kabaca 100 mm'de 525 \u00b5m, 150 mm'de 625\u2013675 \u00b5m, 200 mm'de 725 \u00b5m ve 300 mm'de 775 \u00b5m. \u0130nceltmeden sonra, ana ak\u0131m mant\u0131k tipik olarak 100\u2013300 \u00b5m civar\u0131nda iner, bellek ve 3D istiflenmi\u015f kal\u0131p 50 \u00b5m'nin alt\u0131na iner. Gelen kal\u0131nl\u0131k standart taraf\u0131ndan sabitlenir, ancak inceltilmi\u015f hedef cihaz, paketleme \u015femas\u0131 ve \u00fcretim hatt\u0131n\u0131n g\u00fcvenilir bir \u015fekilde ne kadar ta\u015f\u0131ma marj\u0131 tutabilece\u011fi taraf\u0131ndan se\u00e7ilir.<\/div>\n<\/details>\n<\/div>\n<div style=\"margin: 16px 0;\">\n<h3 style=\"margin: 0 0 4px;\">S: Silikon bir levha ne kadar ince \u00f6\u011f\u00fct\u00fclebilir?<\/h3>\n<details style=\"border: 1px solid #e0e0e0;\">\n<summary style=\"padding: 12px 20px; cursor: pointer; background: #f5f5f5; color: #6b7280;\">Cevab\u0131 G\u00f6r\u00fcnt\u00fcle<\/summary>\n<div style=\"padding: 12px 20px 16px;\">\u00dcretim hatlar\u0131 rutin olarak 50 \u00b5m'ye ula\u015f\u0131r ve geli\u015fmi\u015f paketleme 20 \u00b5m'nin alt\u0131na iter. S\u0131n\u0131r, ta\u015flay\u0131c\u0131n\u0131n kendisi de\u011fil, kullan\u0131m ve mukavemettir. Uzmanla\u015fm\u0131\u015f ara\u015ft\u0131rma hatlar\u0131 silikonun 10 \u00b5m'nin alt\u0131nda oldu\u011funu g\u00f6stermi\u015ftir.<\/div>\n<\/details>\n<\/div>\n<div style=\"margin: 16px 0;\">\n<h3 style=\"margin: 0 0 4px;\">S: Gofret inceltme gofreti zay\u0131flat\u0131r m\u0131 veya kal\u0131p mukavemetini azalt\u0131r m\u0131?<\/h3>\n<details style=\"border: 1px solid #e0e0e0;\">\n<summary style=\"padding: 12px 20px; cursor: pointer; background: #f5f5f5; color: #6b7280;\">Cevab\u0131 G\u00f6r\u00fcnt\u00fcle<\/summary>\n<div style=\"padding: 12px 20px 16px;\">Yapabilir ve bu insanlar\u0131 \u015fa\u015f\u0131rt\u0131r. \u00d6\u011f\u00fcterek inceltme, mikro \u00e7atlaklardan olu\u015fan bir y\u00fczey alt\u0131 hasar tabakas\u0131 b\u0131rak\u0131r ve bu kusurlar - yaln\u0131zca azalt\u0131lm\u0131\u015f kal\u0131nl\u0131k de\u011fil - kal\u0131b\u0131n ne kadar kolay k\u0131r\u0131ld\u0131\u011f\u0131n\u0131 g\u00f6sterir. Silikonun y\u00fczey alt\u0131 hasar tabakas\u0131 \u00fczerine yap\u0131lan ara\u015ft\u0131rmalar, hasarl\u0131 y\u00fczeyin mukavemeti y\u00f6netti\u011fini do\u011frular. Gerilim giderme d\u00fczeltmedir: hasarl\u0131 tabakan\u0131n CMP, kuru a\u015f\u0131nd\u0131rma veya \u0131slak kimyasal inceltme ile \u00e7\u0131kar\u0131lmas\u0131, \u00f6l\u00e7\u00fclebilir \u015fekilde kal\u0131p mukavemetini art\u0131r\u0131r. D\u00fczg\u00fcn \u015fekilde gerilimi azalt\u0131lm\u0131\u015f ince bir levha, daha kal\u0131n, daha p\u00fcr\u00fczl\u00fc olandan daha g\u00fc\u00e7l\u00fc olabilir.<\/div>\n<\/details>\n<\/div>\n<div style=\"margin: 16px 0;\">\n<h3 style=\"margin: 0 0 4px;\">S: Gofret inceltme ve k\u00fcp k\u00fcp kesme aras\u0131ndaki fark nedir?<\/h3>\n<details style=\"border: 1px solid #e0e0e0;\">\n<summary style=\"padding: 12px 20px; cursor: pointer; background: #f5f5f5; color: #6b7280;\">Cevab\u0131 G\u00f6r\u00fcnt\u00fcle<\/summary>\n<div style=\"padding: 12px 20px 16px;\">\u0130nceltme, arka taraf\u0131 ta\u015flay\u0131p parlatarak t\u00fcm levhan\u0131n kal\u0131nl\u0131\u011f\u0131n\u0131 azalt\u0131r.Dicing (die singulation) daha sonra gelir ve inceltilmi\u015f levhay\u0131 testere, lazer veya gizli y\u00f6ntemlerle ayr\u0131 ayr\u0131 tala\u015flara keser.\u0130nceltme her kal\u0131b\u0131n ne kadar ince oldu\u011funu kontrol eder; do\u011frama, levhan\u0131n tala\u015flara nas\u0131l ayr\u0131ld\u0131\u011f\u0131n\u0131 kontrol eder.<\/div>\n<\/details>\n<\/div>\n<div style=\"margin: 48px 0 24px; padding: 20px 24px; background: #f5f5f5; border: 1px solid #e0e0e0;\">\n<h3 style=\"margin: 0 0 12px;\">Bu Analiz Hakk\u0131nda<\/h3>\n<p style=\"color: #6b7280; margin: 0;\">Silikon, SiC ve safir levhalar\u0131 dilimleyen elmas tel testereler \u00fcretiyoruz, bu nedenle levha inceltmenin bir ad\u0131m yukar\u0131s\u0131nda ya\u015f\u0131yoruz. Bu bak\u0131\u015f a\u00e7\u0131s\u0131, bu k\u0131lavuzun temel arg\u00fcman\u0131 olan Dilim-Zemin Prensibini \u015fekillendirdi, \u00e7\u00fcnk\u00fc dilimlenmi\u015f TTV ve y\u00fczey alt\u0131 hasar\u0131n\u0131n, takip eden her \u00f6\u011f\u00fctme ve CMP ad\u0131m\u0131 i\u00e7in tavan bo\u015flu\u011funu nas\u0131l belirledi\u011fini g\u00fcnl\u00fck olarak g\u00f6r\u00fcyoruz. Buradaki s\u00fcre\u00e7 numaralar\u0131 yay\u0131nlanm\u0131\u015f end\u00fcstri ve akademik kaynaklardan al\u0131nm\u0131\u015ft\u0131r; dilimleme-ince kesme ba\u011flant\u0131s\u0131 kendi kesme deneyimimizden gelmektedir. Shanghai Donghe Science and Technology Co., Ltd. teknik ekibi taraf\u0131ndan incelendi.<\/p>\n<\/div>\n<div style=\"margin: 48px 0 24px; padding: 24px; background: #f5f5f5; border: 1px solid #e0e0e0; border-top: 3px solid #2d2d2d;\">\n<h3 style=\"margin: 0 0 16px;\">Referanslar ve Kaynaklar<\/h3>\n<ol style=\"padding-left: 20px; color: #6b7280;\">\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/en.wikipedia.org\/wiki\/Wafer_backgrinding\" target=\"_blank\" rel=\"nofollow noopener\">Gofret ta\u015flama<\/a>Vikipedi (ba\u015flang\u0131\u00e7 kal\u0131nl\u0131\u011f\u0131, inceltilmi\u015f aral\u0131klar, BG bant).<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/semiengineering.com\/the-rise-of-thin-wafer-processing\/\" target=\"_blank\" rel=\"nofollow noopener\">\u0130nce Gofret \u0130\u015flemenin Y\u00fckseli\u015fi<\/a>Yar\u0131 \u0130letken M\u00fchendisli\u011fi, L. Peters, 2025 (hassas merdiven, TTV b\u00fct\u00e7esi, yap\u0131\u015ft\u0131rma\/ba\u011flama).<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/vcsel.mntl.illinois.edu\/research\/wafer_thinning_polishing\/\" target=\"_blank\" rel=\"nofollow noopener\">Gofret \u0130nceltme ve Parlatma<\/a>Illinois \u00dcniversitesi, Fotonik Cihazlar Ara\u015ft\u0131rma Grubu (kucaklama, ta\u015f\u0131y\u0131c\u0131 kullan\u0131m\u0131).<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/ui.adsabs.harvard.edu\/abs\/2018AIPA....8e5223Z\/abstract\" target=\"_blank\" rel=\"nofollow noopener\">Silikonun y\u00fczey alt\u0131 hasar katman\u0131ndaki mekanik \u00f6zellikleri<\/a>AIP Geli\u015fmeleri (Harvard ADS).<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/www.sciencedirect.com\/science\/article\/abs\/pii\/S1369800125009485\" target=\"_blank\" rel=\"nofollow noopener\">\u0130nce yar\u0131 iletken levhalar\u0131n dilimlenmesinde ilerleme ve kritik zorluklar<\/a>ScienceDirect, 2025.<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/www.sciencedirect.com\/science\/article\/pii\/S2095809925006617\" target=\"_blank\" rel=\"nofollow noopener\">Saf Ru n-TSV i\u015fleme ve a\u015f\u0131r\u0131 tamamen kuru SOI levha inceltme<\/a>ScienceDirect, 2025.<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/patents.google.com\/patent\/US10600736B2\/en\" target=\"_blank\" rel=\"nofollow noopener\">US10600736B2<\/a>USPTO (TAIKO halka kenar\u0131 tutma).<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/www.semi.org\/en\/products-services\/standards\/450mm-standards\" target=\"_blank\" rel=\"nofollow noopener\">YARI Standartlar (M1 \/ 450 mm)<\/a>SEMI (gofret kal\u0131nl\u0131\u011f\u0131 \u00f6zellikleri).<\/li>\n<\/ol>\n<\/div>\n<div style=\"margin: 48px 0 24px; padding: 24px; background: #f5f5f5; border: 1px solid #e0e0e0;\">\n<h3 style=\"margin: 0 0 16px;\">\u0130lgili Makaleler<\/h3>\n<ul style=\"padding-left: 20px; margin: 0;\">\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/blog\/silicon-wafer-material\/\" target=\"_blank\">Silikon Gofret Malzemesi<\/a> \u2014 gofretlerin nelerden yap\u0131ld\u0131\u011f\u0131 ve k\u00fcl\u00e7elerin nas\u0131l dilimlendi\u011fi.<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/blog\/semiconductor-manufacturing-process\/\" target=\"_blank\">Yar\u0131 \u0130letken \u00dcretim S\u00fcreci<\/a> \u2014 kumdan \u00e7ipe tam dizi.<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/blog\/semiconductor-manufacturing-equipment\/\" target=\"_blank\">Yar\u0131 \u0130letken \u00dcretim Ekipmanlar\u0131<\/a> \u2014 \u00f6n u\u00e7 ve arka u\u00e7 tak\u0131mlar\u0131.<\/li>\n<li style=\"padding: 4px 0;\"><a style=\"text-decoration: underline; text-underline-offset: 3px; color: #2d2d2d;\" href=\"https:\/\/wiresawcutter.com\/tr\/blog\/types-of-semiconductor-wafers\/\" target=\"_blank\">Yar\u0131 \u0130letken Gofret \u00c7e\u015fitleri<\/a> \u2014 Si, SiC, safir ve GaN substratlar\u0131.<\/li>\n<\/ul>\n<\/div>\n<div style=\"margin: 32px 0 8px; padding: 24px; background: #2d2d2d;\">\n<p style=\"margin: 0 0 16px; color: #ffffff;\">Bir inceltme hatt\u0131 m\u0131 planl\u0131yorsunuz? ta\u015flama ve CMP basamaklar\u0131n\u0131za \u00e7al\u0131\u015fma alan\u0131 sa\u011flayan bir dilim ile ba\u015flay\u0131n.d\u00fc\u015f\u00fck TTV, d\u00fc\u015f\u00fck hasarl\u0131 gofretleme i\u00e7in \u00fcretilmi\u015f elmas tel testereler hakk\u0131nda m\u00fchendislerimizle konu\u015fun.<\/p>\n<p><a style=\"display: inline-block; padding: 14px 32px; background: #ffffff; color: #2d2d2d; font-weight: bold; text-decoration: none;\" href=\"https:\/\/wiresawcutter.com\/tr\/high-tech-precision\/silicon-wafer-cutting-wire-saw\/\" target=\"_blank\">Silikon Gofret Kesme Tel Testereleri Ke\u015ffedin \u2192<\/a><\/p>\n<\/div>\n<\/div>\n<style>\r\n.lwrp.link-whisper-related-posts{\r\n            \r\n            margin-top: 40px;\nmargin-bottom: 30px;\r\n        }\r\n        .lwrp .lwrp-title{\r\n            \r\n            \r\n        }.lwrp .lwrp-description{\r\n            \r\n            \r\n\r\n        }\r\n        .lwrp .lwrp-list-container{\r\n        }\r\n        .lwrp .lwrp-list-multi-container{\r\n            display: flex;\r\n        }\r\n        .lwrp .lwrp-list-double{\r\n            width: 48%;\r\n        }\r\n        .lwrp .lwrp-list-triple{\r\n            width: 32%;\r\n        }\r\n        .lwrp .lwrp-list-row-container{\r\n            display: flex;\r\n            justify-content: space-between;\r\n        }\r\n        .lwrp .lwrp-list-row-container .lwrp-list-item{\r\n            width: calc(25% - 20px);\r\n        }\r\n        .lwrp .lwrp-list-item:not(.lwrp-no-posts-message-item){\r\n            \r\n            \r\n        }\r\n        .lwrp .lwrp-list-item img{\r\n            max-width: 100%;\r\n            height: auto;\r\n            object-fit: cover;\r\n            aspect-ratio: 1 \/ 1;\r\n        }\r\n        .lwrp .lwrp-list-item.lwrp-empty-list-item{\r\n            background: initial !important;\r\n        }\r\n        .lwrp .lwrp-list-item .lwrp-list-link .lwrp-list-link-title-text,\r\n        .lwrp .lwrp-list-item .lwrp-list-no-posts-message{\r\n            \r\n            \r\n            \r\n            \r\n        }@media screen and (max-width: 480px) {\r\n            .lwrp.link-whisper-related-posts{\r\n                \r\n                \r\n            }\r\n            .lwrp .lwrp-title{\r\n                \r\n                \r\n            }.lwrp .lwrp-description{\r\n                \r\n                \r\n            }\r\n            .lwrp .lwrp-list-multi-container{\r\n                flex-direction: column;\r\n            }\r\n            .lwrp .lwrp-list-multi-container ul.lwrp-list{\r\n                margin-top: 0px;\r\n                margin-bottom: 0px;\r\n                padding-top: 0px;\r\n                padding-bottom: 0px;\r\n            }\r\n            .lwrp .lwrp-list-double,\r\n            .lwrp .lwrp-list-triple{\r\n                width: 100%;\r\n            }\r\n            .lwrp .lwrp-list-row-container{\r\n                justify-content: initial;\r\n                flex-direction: column;\r\n            }\r\n            .lwrp .lwrp-list-row-container .lwrp-list-item{\r\n                width: 100%;\r\n            }\r\n            .lwrp .lwrp-list-item:not(.lwrp-no-posts-message-item){\r\n                \r\n                \r\n            }\r\n            .lwrp .lwrp-list-item .lwrp-list-link .lwrp-list-link-title-text,\r\n            .lwrp .lwrp-list-item .lwrp-list-no-posts-message{\r\n                \r\n                \r\n                \r\n                \r\n            };\r\n        }<\/style>\r\n<div id=\"link-whisper-related-posts-widget\" class=\"link-whisper-related-posts lwrp\">\r\n            <div class=\"lwrp-title\">\u0130lgili Yaz\u0131lar<\/div>    \r\n        <div class=\"lwrp-list-container\">\r\n                                            <div class=\"lwrp-list-multi-container\">\r\n                    <ul class=\"lwrp-list lwrp-list-double lwrp-list-left\">\r\n                        <li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/aluminum-nitride-substrate\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">Al\u00fcminyum Nitr\u00fcr (AlN) Substrat: G\u00fc\u00e7 Elektroni\u011finde \u00d6zellikler ve Uygulamalar<\/span><\/a><\/li><li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/multi-wire-saw-installation\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">\u00c7ok Telli Testere Kurulumu: Ad\u0131m Ad\u0131m Kurulum K\u0131lavuzu<\/span><\/a><\/li><li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/types-of-diamond-wire\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">Elmas Tel \u00c7e\u015fitleri: Elektrolize vs Re\u00e7ine Ba\u011fl\u0131 vs Lehimli<\/span><\/a><\/li><li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/single-wire-saw-technology\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">Tek Tel Testere Teknolojisi: Elmas Tel Kesme Nas\u0131l \u00c7al\u0131\u015f\u0131r<\/span><\/a><\/li>                    <\/ul>\r\n                    <ul class=\"lwrp-list lwrp-list-double lwrp-list-right\">\r\n                        <li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/how-diamond-wire-saw-works\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">Diamond Wire Saw Nas\u0131l \u00c7al\u0131\u015f\u0131r: \u00c7al\u0131\u015fma \u0130lkeleri A\u00e7\u0131kland\u0131<\/span><\/a><\/li><li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/diamond-wire-saw-vs-laser-cutting-vs-waterjet-for-ceramics\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">Seramik i\u00e7in Elmas Tel Testere vs Lazer Kesim vs Su Jeti<\/span><\/a><\/li><li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/how-to-choose-a-magnetic-material-cutting-machine\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">Manyetik Malzeme Kesme Makinesi Nas\u0131l Se\u00e7ilir?<\/span><\/a><\/li><li class=\"lwrp-list-item\"><a href=\"https:\/\/wiresawcutter.com\/tr\/blog\/precision-diamond-wire-saw\/\" class=\"lwrp-list-link\"><span class=\"lwrp-list-link-title-text\">Hassas Elmas Tel Testere i\u00e7in Komple K\u0131lavuz<\/span><\/a><\/li>                    <\/ul>\r\n                <\/div>\r\n                        <\/div>\r\n<\/div>","protected":false},"excerpt":{"rendered":"<p>Wafer thinning is the back-end step where a finished silicon wafer is ground and polished down from its full handling thickness to a fraction of it. It rarely makes headlines, yet every stacked memory cube, every thin power device, and every smartcard chip depend on it. This guide walks through what wafer thinning is, the [&hellip;]<\/p>\n","protected":false},"author":11,"featured_media":6534,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_gspb_post_css":"","footnotes":""},"categories":[1],"tags":[],"class_list":["post-6523","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-uncategorized"],"blocksy_meta":[],"_links":{"self":[{"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/posts\/6523","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/users\/11"}],"replies":[{"embeddable":true,"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/comments?post=6523"}],"version-history":[{"count":1,"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/posts\/6523\/revisions"}],"predecessor-version":[{"id":6535,"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/posts\/6523\/revisions\/6535"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/media\/6534"}],"wp:attachment":[{"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/media?parent=6523"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/categories?post=6523"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/wiresawcutter.com\/tr\/wp-json\/wp\/v2\/tags?post=6523"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}